Abstract
Corrosion behavior of AlN ceramics in water at 100°C and corrosion resistance of those pre-oxidized or metallized were investigated. The weight of AlN parabolically gained by reaction with water. Al2O3 layer formed by high temperature oxidation reduced the corrosion of AlN and weight gain of the specimens with 2μm thick Al2O3 layer was 1/10 or less after corrosion for 10d. Weight change of the specimens with AlOOH layer formed by hydrothermal treatment was not found after corrosion. In the case of the specimens metallized 3μm thick Ni or Cu film by sputtering method, the film was oxidized but the corrosion of AlN substrate was not found. Al2O3 and AlOOH layer prepared by oxidation of AlN and sputtered Ni or Cu film improved remarkably the corrosion resistance of AlN substrate.
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