Abstract
The characteristics of a newly developed axial-symmetric transmission gauge (AT gauge) for the measurement of wide pressure range were examined. The secondary electron multiplier used in the previous gauge was replaced by a Faraday cup for analog measurement of ion current. The lower limit of the pressure measurement at present was estimated to be about 10-11 Pa. The sensitivity factor of the AT gauge in the pressure range from 10-10 to 10-6 Pa calibrated by conductance modulation method and in the pressure range from 10-8 to 10-2 Pa calibrated by direct comparison with reference gauges were (2.3±0.04) ×10-3 Pa-1 for hydrogen and (5.8±0.1) ×10-3 Pa-1 for argon, respectively. Uncertainty of the ion current of the AT gauge by the fluctuation of the voltage 1 V of the energy filter was estimated to be about 1%. Long term stability of the electron emission current, intensity of gas phase ion and background signal was estimated to be about 0.03, 0.2 and 6.5%, respectively.
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