Abstract
The basic characteristics of the axial-symmetric transmission gauge (AT gauge), that were modified for measurement over a wide pressure range, are reported. A Faraday cup ion collector is used instead of a secondary electron multiplier to extend the measurable pressure range to 10−3Pa. The sensitivity of the gauge was determined by a conductance modulation method, and by direct comparison against an extractor gauge and a spinning rotor gauge as well. When operating in O2, there was systematic disagreement between pressure readings with the AT gauge and the extractor gauge. This is due to the difference in the elimination efficiency of the electron stimulated desorption ion.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
