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Open Accesshttps://doi.org/10.4139/sfj.47.979
Copy DOI Publication Date: Jan 1, 1996 | |
 License type: free |
Affiliation: Industrial Research Institute, Muroran Institute of Technologyマイクロ波プラズマＣＶＤ法による高温酸化クロム基板上でのダイヤモンド膜の合成
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