Abstract
Iron nitride thin films with perpendicular magnetic anisotropy were prepared by ion-assisted vapor deposition. The films exhibit a large perpendicular magnetic anisotropy field more than 2.5 kOe. Columnar structure was found to grow normal to the substrate. The films consist of a paramagnetic ζ-Fe2N and e-Fe2∼3N phase and a ferromagnetic α-Fe and γ′-Fe4N phase. It can be considered that the main origin of the perpendicular anisotopy is attributable to the shape anisotropy of the normal oriented columnar structure and magnetic separation effect due to the paramagnetic components segregating along each column. It was also found that the large perpendicular anisotropy could easily be obtained by the irradiation of the nitrogen ion-beam at an angle as low as 10° or 30° to the substrate more than one as high as 70°.
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