Abstract
Iron nitride thin films with perpendicular magnetic anisotropy were prepared by ion-assisted vapor deposition. The films exhibited a large perpendicular magnetic anisotropy field (above 2.5 kOe). A columnar structure was found to grow normal to the substrate. The films consisted of paramagnetic ζ-Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> N and ε-Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2-3</sub> N phases and ferromagnetic α-Fe and γ'-Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> N phases. The perpendicular anisotropy may be attributed mainly to the shape anisotropy of the perpendicularly oriented columnar structure and to the magnetic separation effect due to segregation of paramagnetic components along each column. It was also found that a large perpendicular anisotropy is obtained more easily by irradiation with a nitrogen ion beam at low angles such as 10° to 30° from the substrate, rather than at large angles such as 70°.
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