Abstract
This is the report on the apparatus for comparing a precision scale of considerable length with a master scale whose error is already known by an interference fringe counting method.The measuring length of this interferometric system is limited, in general, owing to various causes for the measurement.This apparatus, however, can detect interference fringes for a long distance due to the provision for keeping the path difference between the light path of the reference mirror and that of the moving mirror almost always constant.Basic principle is locating the scale to be checked and the master scale, parallel to each other on the table and measuring the amount of errors of corresponding graduations on the scales through interference fringes.The graduations images of the scale to be checked and interference fringes are transformed into electric signals by photo-electric microscopes and a photo-multiplier respectively.Through these electric signals and the logical circuits the amounts of errors are detected and their sign, plus or minus, are discriminated and the error data are recorded automatically on the printer.
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