Abstract
In order to isolate the external vibration, the precise positioning stage is ordinarily mounted on the vibration isolated table. In this time, it seems that the positioning performance is greatly influenced by its table. However, ignoring the existence of isolated table, the position tuning for only the stage is carried out. Firstly, in this paper, the digital PID compensator is approximated to the continuous system. Then the closed frequency response calculated as a continuous system is compared with the experimental result. Confirming that the calculated frequency response macroscopically coincides with the experimental one, the stage positioning model can be derived. Secondary, the ultimate sensitivity method is applied to this positioning model. However, the desirable control performance is not realized. Considering this reason, it is clear that the isolated table is mechanically coupled with the stage positioning. Finally, the initial PID tuning method instead of the ultimate sensitivity method is applied to the positioning model. As a result, it is shown that the precise stage can be avoided from the dangerous runaway.
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