MWCNT 가스센서의 전극 간극 변화에 따른 NOx 가스 검출 특성

Abstract

Carbon nanotubes(CNT) has chemical stability and great sensitivity characteristics. In particular, the gas sensor required characteristics such as rapid, selectivity and sensitivity sensor. Therefore, CNT are ideal materials to gas sensor. So, we fabricated the NOx gas sensors of MOS-FET type using the MWCNT (multi-walled carbon nanotube). The fabricated sensor was used to detect the NOx gas for the variation of <TEX>$V_{gs}$</TEX>(gate-source voltage) and electrode changed electrode spacing=30, 60, 90[<TEX>${\mu}m$</TEX>]. The gas sensor absorbed with the NOx gas molecules showed the decrease of resistance, and the sensitivity of sensor was increased by magnification of electrode spacing. Furthermore, when the voltage(<TEX>$V_{gs}$</TEX>) was applied to the gas sensor, the decrease in resistance was increased. On the other hand, the sensor sensitivity for the injection of NOx gas was the highest value at the electrode spacing <TEX>$90[{\mu}m]$</TEX>. We also obtained the adsorption energy(<TEX>$U_a$</TEX>) using the Arrhenius plots by the reduction of resistance due to the voltage variations. As a result, we obtained that the adsorption energy was increased with the increment of the applied voltages.