Abstract
Carbon nanotubes (CNT) has the excellent physical characteristics in the sensor, medicine, manufacturing and energy fields, and it has been studied in those fields for the several years. We fabricated the NOx gas sensors of MOS-FET type using the MWCNT. The fabricated sensor was used to detect the NOx gas for the variation of <TEX>$V_{gs}$</TEX> (gate-source voltage) with the ambient temperature. The gas sensor absorbed the NOx gas molecules showed the decrease of resistance, and the sensitivity of sensor was reduced by the NOx gas molecules accumulated on the MWCNT surface. Furthermore, when the voltage (<TEX>$V_{gs}$</TEX>) was applied to the gas sensor, the term of the decrease in resistance was increased. On the other hand, the sensor sensitivity for the injection of NOx gas was the highest value at the ambient temperature of <TEX>$40^{\circ}C$</TEX>. We also obtained the adsorption energy (<TEX>$40^{\circ}C$</TEX>) using the Arrhenius plots by the reduction of resistance due to the <TEX>$V_{gs}$</TEX> voltage variations. As a result, we obtained that the adsorption energy also was increased with the increasement of the applied <TEX>$V_{gs}$</TEX> voltages.
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