Abstract
A mubeam line using focused 1.5 MeV helium ion and proton beams has been realized, by piezo-driven objective slits and a magnetic quadrupole doublet. Minimum spot sizes of 1.0 μm × 1.2 μm for a helium ion beam and 1.2 μ x 1.4 μm for a proton beam were obtained. Secondary electron and Rutherford backscattering (RBS) mapping images were obtained by scanning the muprobe over a sample. A multilayered structure with four layers of Au gratings isolated with silicon dioxide layers was nondestructively analyzed by RBS mapping techniques.
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