Abstract
A microprobe for Rutherford backscattering (RBS) and particle-induced X-ray emission (PIXE) measurements has been realized by focusing 1.5 MeV helium-ion or proton beams with a demagnification system consisting of piezo-driven objective slits and a magnetic quadrupole doublet. Minimum beam spot sizes of 1.3 × 2.2 μm2 for helium ions and 2.2 × 4.0 μm2 for protons have been achieved. The factors which may limit the minimum spot size are discussed using a Monte Carlo simulation procedure. Rutherford backscattering image mapping of 3-dimensional structures is demonstrated.
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