Abstract
A method for robust control of quality errors in a multistage manufacturing process (MMP) is formulated, guaranteeing the product quality even under the worst-case scenario of uncertainties in the knowledge of noise characteristics. Simulations based on the error flow models in automotive cylinder head machining and lithography overlay processes show that the new robust control method increasingly outperforms the traditional stochastic control approach as uncertainties in the knowledge of process noise characteristics increase. It is also shown that controlling MMP quality, while ignoring inaccuracies in the noise model could make quality even worse than if no control is used.
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