Abstract
An experimental design of high resolution non-intrusive displacement sensor working on the principle of basic LDV is being presented. Resolution enhancement has been achieved through phase multiplication using multiple reflections within a high-Q cavity created by a vibrating surface and a high reflection mirror placed parallel to each other. Displacement of 72 nm has been measured with an error range of ±14 nm through direct counting of characteristic peaks in “half cycle” of a interferogram. A linear relationship between displacement and number of reflections has been obtained which offers a straightforward route to measure displacements up to sub-nanometer scale and the resolution is essentially dictated by the reflectivity and physical dimension of moving source.
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