Abstract
In this paper, multiple beams surface plasmon (SP) interference generation based on prism coupling technique is theoretically analyzed and presented. The proposed multiple beams SP interference configuration is investigated for nanolithography application for two-dimensional feature fabrication. The configuration is then numerically and experimentally analyzed by employing aluminum metal at 364-nm illumination wavelengths to realize high resolution and high aspect ratio two-dimensional periodic nanoscale dot array patterns on the recording medium.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
