Abstract
The optical properties of an off-axis integrated cavity system are influenced by both structural deformation and thermal deformation. In this paper, the finite element simulation and analysis software COMSOL multiphysics was used to numerically simulate the optical system. By coupling geometric optics, solid mechanics, and solid heat transfer and conducting parametric temperature scanning, a multiphysics simulation of the off-axis integrated cavity optical sensing system was achieved. The effects of different temperature conditions on the stress field, displacement field, and optical mirrors were analyzed, and changes in optical properties were assessed using ray trajectories and point diagrams. Additionally, optical simulation software was used to simulate and optimize the experimental optical path, obtaining the distribution of light spots on the detector surface. This provides a theoretical basis for the subsequent optimization of the off-axis integrated cavity optical system.
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