Optical system alignment technology based on high-precision surface error reduction

Abstract

In the field of aerospace remote sensing, the errors of optical element surface shape and position misalignment are often mixed together in the off-axis reflection system, which directly affects the accuracy of simulation analysis of computer aided alignment , and reduces the quality and efficiency of the optical system alignment. In order to solve this problem, there propose a surface shape data conversion algorithm, which can convert and process the surface shape data of optical elements. Combined with Code V, we can calculate and remove the influence of the surface shape error on the image quality of the system, and achieve optical alignment of off-axis reflection system fast with high precision. Verified analysis, the accuracy of this algorithm is higher than the traditional inversion Zernike polynomial fitting method, and reduction accuracy is better than 90%. In addition, the surface shape data conversion algorithm can also achieve restore of non-circular optical elements (such as ellipse, rectangle, shading and other arbitrary shapes) in the optical simulation software with high precision, which can provide more accurate results for optical system with high precision and rapid.