Abstract
In this paper, a quartz crystal microbalance (QCM) gas sensor using multiple resonant modes is studied. In this QCM gas sensor, the absorbent is not fully deposited onto the plate surface as in the case of conventional QCM gas sensors. The absorbent is coated on the plate surface, where the external-stress-sensitivity difference between the two modes used is greatest. To confirm the validity of multimode QCMs, we fabricated multimode QCM devices; a polyimide thin film is used as the adsorbent of carbon dioxide, and an 11 MHz AT-cut quartz resonator is used.
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