Multimethods and Underlying Mechanism for Realizing Uniform Discharge From Patterned Structures by Varying Controlling Parameters

Abstract

The uniform gas discharge has long been pursued for realizing or improving some practical applications but is difficult to achieve due to the fact that nonuniform discharges are much easier to be generated in most cases. Usually, achieving uniform gas discharge requires sophisticated devices, and the operation is complicated and time-consuming. In this paper, we introduce simple and flexible multimethods for realizing uniform discharge from patterned structures under dielectric-barrier discharge (DBD) systems by varying experimental controlling parameters, and these methods can be employed in combination. The effects of driving frequency, voltage, duty ratio, and magnetic/electric field on glow DBD structure are investigated. It is found that a uniform glow DBD is obtained when frequency, voltage, and duty ratio are either very high or very low and also by the introduction of strong magnetic/electric field. The underlying physics of these methods is consistent as the elimination of a focusing effect of space electrons. It is concluded that the key of achieving uniform discharge is to uniformize the distribution of space charges.