Abstract
Multilayer thin films of SrCuO2/(Sr0.5Ca0.5)CuO2 with an infinite-layer structure have been prepared on (100) SrTiO3 single crystals by a multitarget RF magnetron sputtering. Heteroepitaxial growth of each SrCuO2 and (Sro.sCa0.5)CuO2 layer was confirmed with c-axis perpendicular to the (100) SrTiO3 surface. The XRD measurements revealed that the compositional modulations of the multilayer films were successfully constructed as we designed. In the TEM images, boundaries between each layer were visible as well as clear substrate-film interface. However there existed planar dislocation parallel to ac- and bc-planes, which went across the boundary of SrCuO2 and (Sr0.5Ca0.5)CuO2 layers.
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