Abstract
Multilayered mirrors based on lanthanum and boron carbides for wavelength near 6.7 nm are manufactured and studied by reflectometry and electron microscopy. Normal incidence mirrors demonstrate reflection coefficient near 40% what is nearly 20% less than theoretical prediction. It seems that the main problem here is interlayer diffusion caused by La high chemical activity, which we propose to solve by implying antidiffusion barrier layers.
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