Abstract
The suitability of Cu/Cr multilayer films as thin film strain gauges is reported. The gauge factor varies between 1.5 and 2.7 for modulation wavelengths between 2 and 6 nm. Cross-sensitivity and hysteresis are very low, whilst linearity and temporal stability are high. Annealed films show a linear variation of gauge factor with film thickness.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
