Abstract
Thick target PIXE analysis has been extended to cases where there is a superposition of layers of different compositions. A computer program was developed for calculating the K α X-ray yield of up to three layers containing up to five different elements each, when bombarded by protons of arbitrary energy. The enhancement of peaks due to secondary fluorescence is included, with the possibility of the primary and secondary emitters being in any of the three layers. The thickness of titanium films deposited on steel backings was measured using the Ti Fe ratio method, and proton energies of 400 to 700 keV.
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