Abstract
Materials for multilayer mirrors have been selected and the limiting values for the reflection coefficient and resolution in the vacuum UV and soft X-ray wavelength ranges (λ=200−20 A ̊ ) have been calculated on the basis of the optical constant data. An attempt has been made to fabricate multilayer mirrors by a modified method of laser deposition. Conditions under which the dose of material evaporated during one laser pulse is stabilized are defined. The possibility of obtaining layers with given thickness without optical control during the film deposition is demonstrated. Mirrors for normal and grazing incidence optics have been fabricated and studied using synchrotron radiation. For wavelengths λ=60−65 A ̊ the reflection coefficients obtained were ≈ 7% for mirrors are normal incidence optics at α=2.5° and 20% for mirrors in grazing incidence optics at λ=53 A ̊ . Multilayer mirrors in the wavelength range 60÷110 Å have been fabricated. The size of focal spot has been shown to be completely determined by the divergence of synchrotron radiation.
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