Abstract
The multilayer magnetic circuit for the millimeter scale MEMS (Micro Electrical Mechanical System) air turbine generator is proposed in this paper. The dimensions of the fabricated air turbine generator were 3.6 mm, 3.4 mm and 3.5 mm, length, width and height, respectively. The air turbine was fabricated by the MEMS technology. Multilayer magnetic circuits were fabricated by the green sheet process. The achieved output voltage and output power of the generator were 6.2mV and 1.92μVA respectively. Moreover, the optimization of the ceramic magnetic circuit for the generator was performed to improve the output power. In this experiment, the horseshoe shape circuit and step-wise shape circuit were compared on the output power by the spindle machine. When two kinds magnetic circuit were compared, the output power of the step-wise shape circuit was higher than that of the horseshoe shape circuit. The output voltage and the output power of the step-wise shape circuit were 28mV and 1.53 mVA when load resistance of 0.512 Ω was connected.
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