Abstract
We report on a quantum dot (QD) structure grown on a 4'' GaAs substrate by metal organic vapor phase epitaxy (MOVPE), which consists of five stacked InAs/InGaAs/GaAs QD layers embedded in the center of a typical in-plane waveguide. The density of the QDs is about 2.5 x 10<sup>10</sup> cm<sup>-2</sup> per QD layer. The photoluminescence (PL) peak wavelength at 1322 nm corresponding to the interband transition of the QD ground states was observed at room temperature with a full width at half-maximum of 49 meV. A good uniformity of the QD structure across the 4'' wafer was verified with a variation of the PL peak wavelength of 0.9 % from the wafer center to the edge. Top p-contacts and a bottom n-contact were processed on the QD structure, and electroluminescence (EL) spectra were measured at different temperatures. An EL peak corresponding to the QD ground states emission was obtained at 1325 nm at room temperature.
Published Version
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