Abstract
To consider the high energy consumption and the key components are easy to damage in CZ crystal furnace, in this paper, a multi-field coupled analysis on temperature and flow field has been carried out by using FEM software ANSYS, and the APDL language of ANSYS is used to implement the parametric model design for CZ crystal furnace. In addition, the abilities of APDL to make dynamic model modification, control calculation procedure and extract the result are exploited to simulate the preparation process of CZ crystal and get the temperature and flow field. The results can be used for guiding the producing process of CZ crystal.
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