Abstract

Lead zirconate titanate (PZT)/Ni cantilevers have been developed using the pulsed laser deposition technique for harnessing magnetic as well as mechanical energy. High voltage (1.2 mV, 1.8 mV, and 8.5 mV) and power density (1100, 2400, and 3600 mW/m3) were generated across the PZT/Ni cantilevers (in 3–3 mode) having PZT thin films deposited at 100 mTorr, 200 mTorr, and 300 mTorr oxygen pressures, respectively, at their respective resonance frequencies with 0.5 g acceleration. Maximum power response (3600 mW/m3) was observed at a load resistance of 100 kΩ for the cantilever having PZT film deposited at 300 mTorr oxygen pressure, which is manifested to the efficient ferroelectric and ferromagnetic properties of PZT/Ni system. The power generated from the PZT/Ni cantilever was further enhanced to 18 700 mW/m3 by superimposing magnetic energy with mechanical vibrations. These results are extremely promising for the realization of an efficient energy harvester utilizing both magnetic and mechanical energy.

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