Motion-induced phase shift for dynamic structured light measurement.

Abstract

Structured light 3D shape measurement is extensively utilized in semiconductor inspection, smart manufacturing, and biomedical imaging due to its rapid measurement speed, high precision, and versatile applicability to different objects. However, the traditional implementations of this method often require that the object remains static while recording the phase-shifting structured light images, which limits the adaptability of dynamic measurement. Here, we propose a dynamic 3D shape measurement using structured light based on a motion-induced phase shift (MIPS). As the object moves, the surface features distort the fringe pattern, resulting in a phase-shifting effect. By employing the MIPS method, we can determine the phase even in the situations where the knowledge of phase-shifting conditions is not accurate. This enables the acquisition of the 3D topography of the object surface with a high level of precision. Experimental results demonstrate that the MIPS method can accurately measure the 3D shape of objects moving as fast as 100 mm/s, with a relative discrepancy of less than 0.23%.