Abstract

é’ˆå¯¹æ–°åž‹å¤šé€šé“åŒæ™¶å•è‰²å™¨ç³»ç»Ÿæ˜“å—æ™¶ä½“ç‰‡å¹³è¡Œåº¦è¯¯å·®å½±å“å¯¼è‡´æ€§èƒ½å¤±æ•ˆçš„é—®é¢˜ï¼Œæå‡ºä¸€ç§è¿­ä»£å­¦ä¹ æ¨¡åž‹é¢„æµ‹æŽ§åˆ¶å™¨ï¼ˆIterative Learning Model Predictive Control,ILMPC)策略。该策略将主-从轴晶体片平行度误差转换为从轴电机的重复参考运动轨迹,采用ILCè¿­ä»£æ¶ˆé™¤å‘¨æœŸæ€§æœºæ¢°å®‰è£ è¯¯å·®ï¼Œå†åˆ©ç”¨MPCå¯¹å•ä¸ªè½¬åŠ¨å‘¨æœŸå† ä»Žè½´ç”µæœºçš„éšæœºæ€§è¯¯å·®è¿›è¡ŒæŠ‘åˆ¶ã€‚æœ€ç»ˆåœ¨å•è½´ç”µæœºè¿åŠ¨å®žéªŒå¹³å°ä¸Šå¯¹è¯¥ç­–ç•¥è¿›è¡Œè½¨è¿¹è·Ÿè¸ªéªŒè¯ã€‚å®žéªŒç»“æžœè¡¨æ˜Žï¼Œåœ¨æ™¶ä½“ç‰‡æœ‰æ•ˆå·¥ä½œåŒºé—´å† ä»Žè½´ç”µæœºçš„ä½ç½®è·Ÿè¸ªè¯¯å·®è¾¾åˆ°1.44″,相比于PID控制、MPC、DOB+MPC以及ILC+PID组合控制器策略,分别降低了99.64%,98.52%,98.26%和73.33%ã€‚ç ”ç©¶ç»“æžœéªŒè¯äº†æ‰€æå‡ºçš„ILMPCç­–ç•¥åœ¨è¡¥å¿æ™¶ä½“ç‰‡å¹³è¡Œåº¦è¯¯å·®å’Œæé«˜å¹³è¡Œå¯¹å‡†ç²¾åº¦æ–¹é¢çš„æœ‰æ•ˆæ€§ï¼Œè¯¥ç­–ç•¥å¯¹äºŽæ”¹å–„æ–°åž‹å¤šé€šé“åŒæ™¶å•è‰²å™¨æ€§èƒ½å ·æœ‰è¾ƒå¥½çš„å®žé™ åº”ç”¨ä»·å€¼ã€‚

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