Abstract
For the precise measurement of the parallelism error between the two crystals in a double crystal monochromator, we suggest a new method that utilizes the pencil beam interferometer. The wave front-splitting pencil beam interferometer was modified, and applied to the measurement. The method overcomes the limitations of the precedent methods that using an autocollimator. Moreover, we can measure the parallelism error continuously through the full scan range with a simple setup. Especially, it should be noted that the angular sensitivity of this method is about 0.07arcsec rms.
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