Abstract
This is an introduction to the Classic Paper on MOSFET scaling by R. Dennard et al., Design of Ion-Implanted MOSFET's with Very Small Physical Dimensions,' published in the IEEE Journal of Solid-State Circuits in October 1974. The history of scaling and its application to very large scale integration (VLSI) MOSFET technology is traced from 1970 to 1998. The role of scaling in the profound improvements in power delay product over the last three decades is analyzed in basic terms.
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