Abstract
The lifespan of plasma discharge devices is strongly influenced by the deterioration characteristics of MgO protective layer deposited on the dielectric covering the electrode. In order to attain both lower driving voltage and higher luminous efficiency in these devices, different complex metal oxides protective layers have been extensively studied as alternatives to MgO. However, the interaction between energetic ions and fast neutral atoms with the protective layer can produce serious damages to it and their nearby components. In this paper, we study the ion beam bombardment for several protective layers by low-energy noble gas with various ion incidence angles by using the Monte Carlo simulation. On the basis of the binary collision approximation using SRIM-2013, different parameters are discussed for instance backscattering yield, retained dose, sputtering yield, number of vacancies, and ion range of MgO, (Mg,Ca)O, (Mg,Sr)O, (Mg,Ba)O and (Mg,Ca,Sr)O. From our results, the retained dose, sputtering yield and number of vacancies of complex metal oxide protective layers are lower than that of MgO. Moreover, the backscattering yield increases by increasing the incident angles and it is highest for complex metal oxide protective layers.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
