Abstract
Abstract This paper briefly outlines how Monte Carlo (MC) simulations on interaction of charged particles with solids had been making progress in those early days in 1960s–1970s in Japan. The studies started in early 1960s by MC simulation of scattering processes of fast electrons in solid, based on a multiple scattering model which was soon after taken over by a more simplified but more practical single scattering model. Since then this type of MC simulation approach has been widely used as a powerful tool, particularly, in the fields of micro-beam analysis, electron beam lithography, etc. The MC simulation model based on the single scattering model was extended to the simulation of scattering of a penetrating ion in solid nearly 10 years later, i.e. in early 1970s, leading to more comprehensive understanding of atomic mixing and sputtering phenomena which are extensively discussed in this workshop.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call