Monte Carlo Simulation of Normal and Abnormal Glow Discharge Plasmas Using the Limited Weight Probability Method

Abstract

A self-consistent Monte Carlo modelling technique has been developed to study normal and abnormal glow discharge plasmas. To simulate nonequilibrium particles, a limited weight probability method is introduced and a fine subslab system is used. These two methods are applied to a DC Ar-like gas discharge simulation. The simulations are performed for conditions corresponding to the experimental voltage and current sets of normal and abnormal glow disharges. The characteristic spatial profiles of plasmas for normal and abnormal glow discharges with high nonequilibrium electron energy distributions are obtained. The increase in the current and the voltage from the normal glow leads to the following: (1) the density peak of the ions rises in the cathode region, (2) the density peak of electrons rises and catches up with that of ions and the peak position occurs closer to the cathode simultaneously; instead of a small increase of plasma density in the bulk plasma region, (3) reversal field strength next to the cathode fall increases and (4) the two groups of the enregy distribution separates into three groups at the cathode fall edge.