α , γ, and normal, abnormal glow discharge modes in radio-frequency capacitively coupled discharges at atmospheric pressure

Abstract

Discharge modes, α and γ, of a radio-frequency helium capacitively coupled discharge at atmospheric pressure were investigated with the discharge gap distance between electrodes varied from 1 to 5mm. As similarly observed in other experiments, the α and γ mode and the α–γ mode transition were observed with large drops in the voltage (310–179V) and the phase angle between the voltage and current (54°–18°), and a contraction of the plasma volume (8.5–0.17cm3, at 3mm gap distance). The discharge voltage where the α–γ mode transition occurred versus the gap distance showed a similar behavior with the Paschen curve for a gas breakdown. Depending on the gap distance, normal and abnormal glow regimes were observed in the αmode. At 1 and 2mm, the α mode remained in the abnormal glow discharge until the α–γ mode transition occurred as the discharge current increases. At 3mm, however, the α mode was excited as a normal glow discharge with a constant current density (17mA∕cm2) but it became an abnormal glow discharge as the current increased. At 4mm, the α mode was sustained as a normal glow discharge, then the transition to the γ mode occurred. Using a simple resistor-capacitor circuit model and a α sheath breakdown model, the discharge modes and the mode transition properties were studied.