Abstract
A static Monte Carlo simulation program has been used to study the influence of primary and secondary knock-on atoms on the angular distribution and the fractionation, for zero-fluence sputtering of 92Mo– 100Mo. At 10 keV Xe ion energy, calculations show that significant depth-dependent momentum asymmetry exists in the near-surface region, as in Refs. (L.P. Zheng, R.S. Li, M.Y.Li, Nucl. Instr. and Meth. B 100 (1995) 490; L.P. Zheng, M.Y. Li, Nucl. Instr. and Meth. B 114 (1996) 28). The calculations also show that at the polar emission angle range between 0° and 90° the probabilities of the sputtered primary knock-on atoms for 92Mo and 100Mo are small (6.1% for 92Mo and 6.6% for 100Mo), especially, between 0° and 30° they are very small (2.5% for 92Mo and 2.8% for 100Mo). At 0.1 keV Ar ion energy, the calculations show that partial momentum flux ratios, for the primary and the secondary knock-on atoms, deviate far from one, through marker plane 1 (about an atomic layer distance from the surface).
Published Version
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