Abstract
Abstract Multilayer piezoelectric ceramics promise to close the gap between the high electric field strengths required to generate the largest possible deformation in piezoelectric ceramics and the low supply voltages (5 V to 15 V) conventional in present-day electronics. Multilayer PZT ceramics with ceramic layer thicknesses down to 30 pm were prepared using a metal injection process which, especially from the economic aspect, is of very great interest. In small-signal operation these multilayer ceramics exhibit a piezoelectric strain constant that is only about 10% to 15% smaller than that of plain PZT of like composition. Using a series model this can be traced back to the clamping effect of the inactive electrodes. At large signal amplitudes the increased no-load deflection of piezoelectric actuators otherwise caused by 90° domain wall displacements is not fully effective. Multilayer ceramic actuators attain the same blocking forces as those of actuators made of plain ceramic.
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