Abstract
Abstract New monolithic multicomponents ceramic (MMC) substrates were made using the glass-ceramic material, low firing high dielectric constant ceramic material, metal oxide resistance materials and metal conductors with green sheets laminating cofiring process technologies. In the MMC substrates, many passive components, such as capacitors, resistors and wiring conductors can be involved. The new MMC substrates have the following excellent characteristics: 1) Many large capacitance capacitors can be formed in the substrate (10 pF - 3 μF); 2) Many large resistance resistors can be formed in the substrate (10 Ω/□ - 1 MΩ/□); 3) Silver, silver-palladium and gold can be used in wiring conductors or internal electrodes; 4) A plurality of resistor and capacitor elements can be three-dimensionally constructed in the substrate; 5) Miniaturization and cost reduction can be accomplished in the substrate. The MMC substrates were applied to voltage controlled crystal oscillator (VCXO) circuits and RC active filter c...
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