Abstract
AbstractIt has been experimentally demonstrated that a single layer of silver functions as a “superlens” [Fang et al, Science 308, 534 (2005)], providing image resolution much better than the diffraction limit. Resolution as high as 60 nanometer (λ/6) half-pitch was achieved. In this paper, we explore the possibility of further refining the image resolution using a “multilayer superlens” design. With optimized design of silver-alumina multilayer superlens, our numerical simulations show a feasibility of resolving 15nm features, about 1/26th of the illumination wavelength. We present preliminary experimental results targeted towards achieving the molecular scale imaging resolution. The development of potential low-loss and high resolution superlens opens the door to exciting applications in nanoscale optical metrology and nanomanufacturing.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
