Abstract
For the purpose to clarify the process steps and to actualize the low temperature perfect crystal growth technique, photo-excited reactions in halide vapor phase epitaxy (VPE) and in metalorganic CVD (MO-CVD), adsorption and surface reaction processes in molecular layer epitaxy are investigated. Based on these results synchronized photo-excitation and synchronized temperature excitation in molecular layer epitaxy is introduced as the individual excitation of each process step of the growth reaction.
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