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Abstract
Molecular ion implanter was developed with a liquid-metal alloy ion source. Use of a liquid-metal alloy ion source enables us to generate various kinds of molecular ions. To apply liquid-metal ion source to a general ion implanter, it is necessary to converge the divergent beam. We adopted the lens system we have already developed, and examined its performance by computer simulation and experiments. An example of molecular ion implantation was demonstrated with gold-antimony ion source. 24 keV AuSb2+ was implanted into silicon, and presence of gold and antimony atoms was confirmed by Rutherford backscattering spectrometry and particle induced x-ray emission measurements.
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