Abstract

Molecular dynamics is used to simulate the mechanical behaviour of zinc oxide under nanoscratching and nanoindentation. The effects of indenter speed and substrate temperature on the structure-phase formation, slip vector, radial distribution function, and residual stresses are investigated. Simulation results show that the dislocation loops nucleate and propagate, forming a body-centred tetragonal lattice structure along the slip direction due to high local stress. Furthermore, the dislocation loops nucleate and propagate due to the resolved shear stress along the 45° slip direction under nanoscratching. The average mean biaxial stress and the normal stress of the O layers are –9.35 and –4.36 GPa, respectively, and those of the Zn layers are –0.80 and –0.30 GPa, respectively. This may be attributed to the energetic O atoms, with which unstable atoms have high activation.

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