Molecular Dynamics Simulation of Nanoimprinting Under a High-Frequency Vibration Perturbation

Abstract

Nanoimprinting is a simple and efficient way to generate nanopatterns over a large area by pressing a master mould to penetrate into the surface of a substrate. It is known that interfacial friction force is a main factor responsible for pattern defects in nanoimprints. Here, nanoimprinting of metals by carbon nanotube arrays under a high-frequency vibration perturbation were studied via molecular dynamics simulations. The effect of mechanical vibration on material deformation and imprint force during nanoimprinting were examined. The results show that the pressing and frictional forces can be reduced significantly by exciting the mechanical resonances of the nanoimprinting system. The friction reduction strongly depends on the frequency and amplitude of the vibration. This work demonstrates that the nanoimprinting process can be controlled by external vibration, which may have an important implication for defect prevention in nanoimprinting.