Molecular dynamic simulation of rutile surface bombardment by argon cluster ions

Abstract

Molecular dynamic simulation of the interaction of accelerated argon cluster ions with rutile surface was performed. The dependence of the amount of sputtered material, as well as the structure and size of arising impact craters and damaged layer on the mass of cluster ions, their energy and angle of incidence was studied. A strong influence of the high anisotropy of the mechanical properties of rutile on these dependencies was demonstrated. The evolution of the surface relief and of the damaged layer characteristics caused by successive impacts of the cluster ions was also considered. The regularities revealed by the simulation were used for the analysis of experimental results obtained by treatment with a beam of argon cluster ions of titanium implants, the surface of which was covered with a layer of rutile.