Molecular beam epitaxy as a method for the growth of freestanding zinc-blende (cubic) GaN layers and substrates

Abstract

The authors have studied the growth of bulk, freestanding zinc-blende (cubic) GaN layers by plasma-assisted molecular beam epitaxy (PA-MBE). They have established that the best structural properties of freestanding zinc-blende GaN can be achieved with initiation under Ga-rich conditions but without Ga droplet formation. It is difficult to initiate the growth of zinc-blende GaN, but it is even more difficult to sustain the growth of the pure zinc-blende polytype in thick layers without any wurtzite inclusions. In order to grow high quality freestanding cubic GaN layers, it is necessary to maintain the same growth conditions for about 1week. The best quality zinc-blende phase GaN was achieved in the first 10μm of the GaN layers. The authors have produced zinc-blende GaN substrates from our thick bulk GaN layers and they used the side previously attached to the GaAs substrate as the episide of these zinc-blende GaN substrates. They have demonstrated the scalability of the process by growing zinc-blende GaN layers on 2 and 3in. diameter wafers. The growth of freestanding bulk GaN layers has allowed them to refine the value for the lattice parameter of zinc-blende GaN as 4.510±0.005Å. They have demonstrated that the PA-MBE process developed has allowed them to grow freestanding AlxGa1−xN wafers.