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https://doi.org/10.1016/0921-5107(94)90311-5
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Cite Journal: Materials Science and Engineering: B |  Publication Date: May 1, 1994 |
 Citations: 3 |
The basic principles of cathodoluminescence with electron beam energy and intensity modulation and its application for the characterization of depth inhomogeneities in semiconductor crystals have been discussed. The results of numerical simulation, illustrating the possibility of exponential profile reconstruction, are presented.
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