Modified predictive formula for the electron stopping power

Abstract

We report an improved predictive formula for the electron stopping power (SP) based on an analysis and fit of SPs and electron inelastic mean free paths (IMFPs) calculated from optical data for 37 elemental solids and energies between 200eV and 30keV. The formula is a function of energy, density, and IMFP, and is recommended for solids with atomic numbers larger than 6. While the mean deviation between predicted and calculated SPs was 7.25%, larger deviations were found for four additional materials, Li (22.2%), Be (17.9%), graphite (15.3%), and diamond (15.7%). The predictive SP formula can be applied to multicomponent materials. Test comparisons for two compounds, guanine and InSb, showed average deviations of 16.0% and 19.1%, respectively. The improved SP formula is expected to be useful in simulations of electron trajectories in solids with the continuous slowing-down approximation (e.g., in Auger-electron spectroscopy and electron microprobe analysis).