Abstract
Lead Phthalocyanine (PC) tetracarboxylic acid prepared by chemical reaction from phthalic anhydride and urea was used as sensor element for sensing humidity and alcohol vapors. The surface was treated with electron cyclotron resonance (ECR) plasma consisting of 25% H 2 and 75% N 2. Remarkable improvement in the selectivity with respect to ethyl alcohol and reduction in the sensitivity for humidity was observed after this treatment. The response and recovery time for resistive sensing were of the order of 50 and 30 s respectively. X-ray photoelectron spectroscopy and Fourier transformation infra red studies showed that the increased cross-linking of PC is responsible for the creation of new functional groups which have imparted the sensing of alcohol vapor through extrinsic doping.
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