Abstract
In the present work we investigate effects of MeV heavy ions (from 0.4 MeV Xe to 15 MeV Si) on regularly ordered nanoparticle (NP) lattices embedded in amorphous alumina matrix. These nanostructures were produced by self-assembling growth using magnetron-sputtering deposition. From grazing incidence small-angle x-ray scattering measurements we have found that the used MeV heavy ions do not change the NP sizes, shapes or distances among them. However, ions cause a tilt of the entire NP lattice in the direction parallel to the surface. The tilt angle depends on the incident ion energy, type and the applied fluence and a nearly linear increase of the tilt angle with the ion fluence and irradiation angle was found. This way, MeV heavy ion irradiation can be used to design custom-made NP lattices. In addition, grazing incidence small-angle x-ray scattering can be effectively used as a method for the determination of material redistribution/shift caused by the ion hammering effect. For the first time, the deformation yield in amorphous alumina was determined for irradiation performed at the room temperature.
Highlights
Materials consisting of metal or semiconductor nanoparticles (NPs) are very interesting for many applications, especially in the field of photonics [1,2,3,4]
Contrary to the case of (Ge+SiO2)/SiO2 multilayers where no visible Ge clustering can be seen if magnetron sputtering deposition is performed at the room temperature (RT), in the case of (Ge+Al2O3)/Al2O3 multilayers, amorphous Ge NPs always form during the magnetron sputtering deposition regardless if the deposition is performed at RT or at a slightly elevated temperature [13, 30]
Such regular ordering induces appearance of diffraction (Bragg) spots and sheets in the grazing incidence small angle x-ray scattering (GISAXS) maps of the films. (The spots are indicated by circles and lines in figures 1(a) and (b).) These spots are related to Ge NP ordering mainly, while the sheets are related to the correlated interface roughness of the multilayer
Summary
I Bogdanović Radović, M Buljan, M Karlušić, M Jerčinović, G Dražič, S Bernstorff and R Boettger. Any further distribution of In the present work we investigate effects of MeV heavy ions (from 0.4 MeV Xe to 15 MeV Si) on this work must maintain regularly ordered nanoparticle (NP) lattices embedded in amorphous alumina matrix. These attribution to the author(s) and the title of nanostructures were produced by self-assembling growth using magnetron-sputtering deposition. The tilt angle depends on the incident ion energy, type and the applied fluence and a nearly linear increase of the tilt angle with the ion fluence and irradiation angle was found This way, MeV heavy ion irradiation can be used to design custom-made NP lattices. The deformation yield in amorphous alumina was determined for irradiation performed at the room temperature
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